XU Hong
Associate Professor
Division of New Energy and Materials Chemistry
hongxu@tsinghua.edu.cn
(+86 10) 6279-4226
Education background
Ph.D., Institute for Molecular Science, Structural Molecular Science, 2015
M.S., Shanghai Jiao Tong University, Polymeric Chemistry and Physics, 2012
B.S., Shanghai Jiao Tong University, Applied Chemistry, 2009
Experience
Ph.D., Institute for Molecular Science, Structural Molecular Science, 2015
M.S., Shanghai Jiao Tong University, Polymeric Chemistry and Physics, 2012
B.S., Shanghai Jiao Tong University, Applied Chemistry, 2009
Social service
Teaching
Green Batteries
Areas of Research Interests/ Research Projects
Prof. Xu’s research interests are in the areas of Extreme Ultraviolet Photoresists, Covalent Organic Frameworks, and Lithium-ion Batteries.
Extreme Ultraviolet Photoresists
Lithography enabled nanoscale fabrication in the semiconductor industry, is also the primarily driven force for the microelectronics revolution. With the rapid development of semiconductors, today's 193-nm immersion lithography is approaching its physical limits. However, the next-generation lithography — extreme ultraviolet (EUV) lithography is facing enormous challenges due to the very limited brightness of EUV light sources and lacking suitable photoresist materials. In my lab, we are developing a novel series of metal-oxide nanoparticles (MONPs) based photoresists, aims at overcoming the light source challenges by utilizing the efficient EUV-absorption feature of transition metals. Compared with the well-established polymer-based photoresists, MONPs type photoresists possess significantly higher etch resistance and smaller constituent size, whereas at the same time display promising lithographic performance using DUV, e-beam, and EUV exposure. Now utilizing these emerging resist materials, we are able to fabricate nanostructures as small as 13 nm wide under EUV lithography, meet the requirement of 3.5 nm technology node.
Covalent Organic Frameworks
Covalent organic frameworks (COFs) are extended structures with periodic molecular orderings and inherent porosity. Through atomically precise integration of building blocks to create predesigned skeletons and nano-pores, a large number of COFs with various structures, compositions, and pore environments have been developed in recent years. The porous nature endows COFs with great potential on hydrogen/hydrocarbon storage, CO2 capture, chemical separation, and drug delivery. Besides, the well-ordered channel structures which originated from their unique crystalline features, are considered to be efficient mass transport pathways, and thus caused tremendous interests in heterogeneous catalysis, ion-conduction, lithium-ion batteries, and super capacitors. In my lab, we are focusing on designing new COF materials and exploring their applications in energy storage and environmental science.
Research Status
2020-2022, Zhejiang Lab
High-throughput Two-photon Lithography System: Multifunctional Photoresists.
2019-2021, Tsinghua University-Zhangjiagang Joint Institute for Hydrogen Energy and Lithium Ion Battery Technology.
Covalent Organic Frameworks based Hydrogen Storage Materials
Honors And Awards
Chinese Government Award for Outstanding Self-financed Students Abroad (2014), China Scholarship Council
Silver medal in Chinese National Chemistry Olympiad (2005), Chinese Chemical Society
Academic Achievement
Publications
Hong Xu, Shanshan Tao & Donglin Jiang. Proton conduction in crystalline and porous covalent organic frameworks. Nature Materials, 15, 722-726 (2016). doi: 10.1038/nmat4611
Hong Xu, Kazunori Sakai, Kazuki Kasahara, Vasiliki Kosma, Kou Yang, Henry C. Herbol, Jeremy Odent, Paulette Clancy, Emmanuel P. Giannelis & Christopher K. Ober. Metal-Organic Framework-Inspired Metal-Containing Clusters for High-Resolution Patterning. Chemistry of Materials, 30, 4124-4133 (2018). doi: 10.1021/acs.chemmater.8b01573
Hong Xu, Jia Gao & Donglin Jiang. Stable, crystalline, porous, covalent organic frameworks as a platform for chiral organocatalysts. Nature Chemistry, 7, 905-912 (2015). doi: 10.1038/nchem.2352. (Highlighted by Phys.Org., Chemistry World, Chemeurope.com. and Synfacts)
Hong Xu, Xiong Chen, Jia Gao, Jianbin Lin, Matthew Addicoat, Stephan Irle & Donglin Jiang. Catalytic covalent organic frameworks via pore surface engineering. Chemical Communications, 50, 1292-1294 (2014). doi: 10.1039/c3cc48813f. (Selected as Back Cover)
Hong Xu & Donglin Jiang. Covalent organic frameworks: Crossing the channel. Nature Chemistry, 6, 564-566 (2014). doi: 10.1038/nchem.1984
Enquan Jin, Mizue Asada, Qing Xu, Sasanka Dalapati, Matthew A Addicoat, Michael A Brady, Hong Xu, Toshikazu Nakamura, Thomas Heine, Qiuhong Chen & Donglin Jiang. Two-dimensional sp2 carbon-conjugated covalent organic frameworks. Science, 357, 673-676 (2017). doi: 10.1126/science.aan0202
Sasanka Dalapati, Matthew Addicoat, Shangbin Jin, Tsuneaki Sakurai, Jia Gao, Hong Xu, Stephan Irle, Shu Seki & Donglin Jiang. Rational design of crystalline supermicroporous covalent organic frameworks with triangular topologies. Nature Communications, 6, 7786 (2015). doi: 10.1038/ncomms8786
Hong Xu, Vasiliki Kosma, Kazunori Sakai, Emmanuel P. Giannelis & Christopher K. Ober. EUV photolithography: resist progress in metal–organic complex photoresists. Journal of Micro/Nanolithography, MEMS, and MOEMS, 18 (2018). doi: 10.1117/1.Jmm.18.1.011007
Hong Xu, Vasiliki Kosma, Emmanuel P. Giannelis & Christopher K. Ober. In pursuit of Moore's Law: polymer chemistry in action. Polymer Journal, 50, 45-55 (2018). doi: 10.1038/pj.2017.64
Lingling Wang, Cheng Zeng, Hong Xu, Panchao Yin, Dongcheng Chen, Jian Deng, Mu Li, Nan Zheng, Cheng Gu & Yuguang Ma. A highly soluble, crystalline covalent organic framework compatible with device implementation. Chem Sci, 10, 1023-1028 (2019). doi: 10.1039/c8sc04255a
Lipeng Zhai, Ning Huang, Hong Xu, Qiuhong Chen & Donglin Jiang. A backbone design principle for covalent organic frameworks: the impact of weakly interacting units on CO2 adsorption. Chemical Communications, 53, 4242-4245 (2017). doi: 10.1039/c7cc01921a
Yanhong Xu, Shangbin Jin, Hong Xu, Atsushi Nagai & Donglin Jiang. Conjugated microporous polymers: design, synthesis and application. Chemical Society Reviews, 42, 8012-8031 (2013). doi: 10.1039/c3cs60160a
Fei Xu, Hong Xu, Xiong Chen, Dingcai Wu, Yang Wu, Hao Liu, Cheng Gu, Ruowen Fu & Donglin Jiang. Radical covalent organic frameworks: a general strategy to immobilize open-accessible polyradicals for high-performance capacitive energy storage. Angewandte Chemie International Edition, 54, 6814-6818 (2015). doi: 10.1002/anie.201501706
Yang Wu, Hong Xu, Xiong Chen, Jia Gao & Donglin Jiang. A pi-electronic covalent organic framework catalyst: pi-walls as catalytic beds for Diels-Alder reactions under ambient conditions. Chemical Communications, 51, 10096-10098 (2015). doi: 10.1039/c5cc03457d
Ning Huang, Lipeng Zhai, Hong Xu & Donglin Jiang. Stable Covalent Organic Frameworks for Exceptional Mercury Removal from Aqueous Solutions. Journal of the American Chemical Society, 139, 2428-2434 (2017). doi: 10.1021/jacs.6b12328
Cheng Gu, Ning Huang, Yang Wu, Hong Xu & Donglin Jiang. Design of Highly Photofunctional Porous Polymer Films with Controlled Thickness and Prominent Microporosity. Angewandte Chemie International Edition, 54, 11540-11544 (2015). doi: 10.1002/anie.201504786
Cheng Gu, Ning Huang, Youchun Chen, Leiqiang Qin, Hong Xu, Shitong Zhang, Fenghong Li, Yuguang Ma & Donglin Jiang. pi-Conjugated Microporous Polymer Films: Designed Synthesis, Conducting Properties, and Photoenergy Conversions. Angewandte Chemie International Edition, 54, 13594-13598 (2015). doi: 10.1002/anie.201506570
Shi Feng, Hong Xu, Chong Zhang, Yu Chen, Jinghui Zeng, Donglin Jiang & Jia-Xing Jiang. Bicarbazole-based redox-active covalent organic frameworks for ultrahigh-performance energy storage. Chemical Communications, 53, 11334-11337 (2017). doi: 10.1039/c7cc07024a
Xiong Chen, Ning Huang, Jia Gao, Hong Xu, Fei Xu & Donglin Jiang. Towards covalent organic frameworks with predesignable and aligned open docking sites. Chemical Communications, 50, 6161-6163 (2014). doi: 10.1039/c4cc01825g
Xiong Chen, Matthew Addicoat, Enquan Jin, Lipeng Zhai, Hong Xu, Ning Huang, Zhaoqi Guo, Lili Liu, Stephan Irle & Donglin Jiang. Locking covalent organic frameworks with hydrogen bonds: general and remarkable effects on crystalline structure, physical properties, and photochemical activity. Journal of the American Chemical Society, 137, 3241-3247 (2015). doi: 10.1021/ja509602c
Xiong Chen, Matthew Addicoat, Enquan Jin, Hong Xu, Taku Hayashi, Fei Xu, Ning Huang, Stephan Irle & Donglin Jiang. Designed synthesis of double-stage two-dimensional covalent organic frameworks. Scientific Reports, 5, 14650 (2015). doi: 10.1038/srep14650
Mufei Yu, Hong Xu, Vasiliki Kosma, Jeremy Odent, Kazuki Kasahara, Emmanuel Giannelis & Christopher Ober. Positive Tone Nanoparticle Photoresists: New Insight on the Patterning Mechanism. Journal of Photopolymer Science and Technology, 29, 509-512 (2016). doi: 10.2494/photopolymer.29.509
Kazunori Sakai, Hong Xu, Vasiliki Kosma, Emmanuel P. Giannelis & Christopher K. Ober. Progress in metal organic cluster EUV photoresists. Journal of Vacuum Science & Technology B, 36 (2018). doi: 10.1116/1.5050942
Christopher K. Ober, Hong Xu, Vasiliki Kosma, Kazunori Sakai & Emmanuel P. Giannelis. EUV Photolithography: Resist Progress and Challenges. Proceedings of SPIE, 10583, 1058306 (2018). doi: 10.1117/12.2302759
Christopher K. Ober, Vasiliki Kosma, Hong Xu, Kazunori Sakai & Emmanuel P. Giannelis. The Challenges of Highly Sensitive EUV Photoresists. Journal of Photopolymer Science and Technology, 31, 261-265 (2018). doi: 10.2494/photopolymer.31.261
Vasiliki Kosma, Kazuki Kasahara, Hong Xu, Kazunori Sakai, Christopher K. Ober & Emmanuel P. Giannelis. Patterning mechanism of metal based hybrid EUV resists. Proceedings of SPIE, 10583, 105831U (2018). doi: 10.1117/12.2297383
Vasiliki Kosma, Kazuki Kasahara, Hong Xu, Jérémy Odent, Christopher K. Ober & Emmanuel P. Giannelis. Elucidating the patterning mechanism of zirconium-based hybrid photoresists. Journal of Micro-Nanolithography Mems and Moems, 16, 041007-041001-041007 (2017). doi: 10.1117/1.Jmm.16.4.041007
Kazuki Kasahara, Hong Xu, Vasiliki Kosma, Jeremy Odent, Emmanuel P. Giannelis & Christopher K. Ober. Nanoparticle photoresist studies for EUV lithography. Proceedings of SPIE, 10143, 1014308 (2017). doi: 10.1117/12.2258187
Kazuki Kasahara, Hong Xu, Vasiliki Kosma, Jeremy Odent, Emmanuel P. Giannelis & Christopher K. Ober. Recent Progress in EUV Metal Oxide Photoresists. Journal of Photopolymer Science and Technology, 30, 93-97 (2017). doi: 10.2494/photopolymer.30.93
Kazuki Kasahara, Vasiliki Kosma, Jeremy Odent, Hong Xu, Mufei Yu, Emmanuel P. Giannelis & Christopher K. Ober. Recent progress in nanoparticle photoresists development for EUV lithography. Proceedings of SPIE, 9776, 977604 (2016). doi: 10.1117/12.2218704
Last updated: 2020-10-07
