Associate Professor

Division of New Energy and Materials Chemistry

hongxu@tsinghua.edu.cn

(+86 10) 6279-4226

Education background

Ph.D., Institute for Molecular Science, Structural Molecular Science, 2015
M.S., Shanghai Jiao Tong University, Polymeric Chemistry and Physics, 2012
B.S., Shanghai Jiao Tong University, Applied Chemistry, 2009

Experience

Ph.D., Institute for Molecular Science, Structural Molecular Science, 2015
M.S., Shanghai Jiao Tong University, Polymeric Chemistry and Physics, 2012
B.S., Shanghai Jiao Tong University, Applied Chemistry, 2009

Social service

Teaching

Green Batteries

Areas of Research Interests/ Research Projects

Prof. Xus research interests are in the areas of Extreme Ultraviolet Photoresists, Covalent Organic Frameworks, and Lithium-ion Batteries.

Extreme Ultraviolet Photoresists

Lithography enabled nanoscale fabrication in the semiconductor industry, is also the primarily driven force for the microelectronics revolution. With the rapid development of semiconductors, today's 193-nm immersion lithography is approaching its physical limits. However, the next-generation lithography  extreme ultraviolet (EUV) lithography is facing enormous challenges due to the  very limited brightness of EUV light sources and lacking suitable photoresist materials. In my lab, we are developing a novel series of metal-oxide nanoparticles (MONPs) based photoresists, aims at overcoming the light source challenges by utilizing the efficient EUV-absorption feature of transition metals. Compared with the well-established polymer-based photoresists, MONPs type photoresists possess significantly higher etch resistance and smaller constituent size, whereas at the same time display promising lithographic performance using DUV, e-beam, and EUV exposure. Now utilizing these emerging resist materials, we are able to fabricate nanostructures as small as 13 nm wide under EUV lithography, meet the requirement of 3.5 nm technology node.

Covalent Organic Frameworks

Covalent organic frameworks (COFs) are extended structures with periodic molecular orderings and inherent porosity. Through atomically precise integration of building blocks to create predesigned skeletons and nano-pores, a large number of COFs with various structures, compositions, and pore environments have been developed in recent years. The porous nature endows COFs with great potential onhydrogen/hydrocarbon storage, CO2 capture, chemical separation, and drug delivery. Besides, the well-ordered channel structures which originated from their unique crystalline features, are considered to be efficient mass transport pathways, and thus caused tremendous interests in heterogeneous catalysis, ion-conduction, lithium-ion batteries, and super capacitors. In my lab, we are focusing on designing new COF materials and exploring their applications in energy storage and environmental science.

Research Status

2020-2022, Zhejiang Lab
High-throughput Two-photon Lithography System: Multifunctional Photoresists.

2019-2021, Tsinghua University-Zhangjiagang Joint Institute for Hydrogen Energy and Lithium Ion Battery Technology.
Covalent Organic Frameworks based Hydrogen Storage Materials

Honors And Awards

Chinese Government Award for Outstanding Self-financed Students Abroad (2014), China Scholarship Council
Silver medal in Chinese National Chemistry Olympiad (2005), Chinese Chemical Society

Academic Achievement

Publications

Hong  Xu, Shanshan Tao & Donglin Jiang. Proton conduction in crystalline and  porous covalent organic frameworks. Nature Materials,  15, 722-726 (2016). doi: 10.1038/nmat4611
Hong  Xu, Kazunori Sakai, Kazuki Kasahara, Vasiliki Kosma, Kou Yang, Henry C. Herbol,  Jeremy Odent, Paulette Clancy, Emmanuel P. Giannelis & Christopher K. Ober.  Metal-Organic Framework-Inspired Metal-Containing Clusters for High-Resolution  Patterning. Chemistry of Materials,  30, 4124-4133 (2018). doi:  10.1021/acs.chemmater.8b01573
Hong  Xu, Jia Gao & Donglin Jiang. Stable, crystalline, porous, covalent organic  frameworks as a platform for chiral organocatalysts. Nature  Chemistry, 7, 905-912 (2015). doi:  10.1038/nchem.2352. (Highlighted by Phys.Org., Chemistry World,  Chemeurope.com. and Synfacts)
Hong Xu,  Xiong Chen, Jia Gao, Jianbin Lin, Matthew Addicoat, Stephan Irle & Donglin  Jiang. Catalytic covalent organic frameworks via pore surface engineering.  Chemical Communications, 50,  1292-1294 (2014). doi: 10.1039/c3cc48813f. (Selected  as Back Cover)
Hong Xu & Donglin Jiang. Covalent organic frameworks: Crossing the channel.  Nature Chemistry, 6, 564-566 (2014).  doi: 10.1038/nchem.1984
Enquan  Jin, Mizue Asada, Qing Xu, Sasanka Dalapati, Matthew A Addicoat, Michael A  Brady, Hong Xu, Toshikazu Nakamura, Thomas Heine, Qiuhong Chen & Donglin  Jiang. Two-dimensional sp2 carbon-conjugated covalent organic frameworks.  Science, 357, 673-676 (2017). doi:  10.1126/science.aan0202
Sasanka  Dalapati, Matthew Addicoat, Shangbin Jin, Tsuneaki Sakurai, Jia Gao, Hong Xu,  Stephan Irle, Shu Seki & Donglin Jiang. Rational design of crystalline  supermicroporous covalent organic frameworks with triangular topologies. Nature Communications, 6, 7786 (2015). doi:  10.1038/ncomms8786
Hong  Xu, Vasiliki Kosma, Kazunori Sakai, Emmanuel P. Giannelis & Christopher K.  Ober. EUV photolithography: resist progress in metal
organic complex  photoresists. Journal of Micro/Nanolithography, MEMS, and  MOEMS, 18 (2018). doi:  10.1117/1.Jmm.18.1.011007
Hong  Xu, Vasiliki Kosma, Emmanuel P. Giannelis & Christopher K. Ober. In pursuit  of Moore's Law: polymer chemistry in action. Polymer  Journal, 50, 45-55 (2018). doi:  10.1038/pj.2017.64
Lingling  Wang, Cheng Zeng, Hong Xu, Panchao Yin, Dongcheng Chen, Jian Deng, Mu Li, Nan  Zheng, Cheng Gu & Yuguang Ma. A highly soluble, crystalline covalent organic  framework compatible with device implementation. Chem  Sci, 10, 1023-1028 (2019). doi:  10.1039/c8sc04255a
Lipeng  Zhai, Ning Huang, Hong Xu, Qiuhong Chen & Donglin Jiang. A backbone design  principle for covalent organic frameworks: the impact of weakly interacting  units on CO2 adsorption. Chemical Communications,  53, 4242-4245 (2017). doi: 10.1039/c7cc01921a
Yanhong  Xu, Shangbin Jin, Hong Xu, Atsushi Nagai & Donglin Jiang. Conjugated  microporous polymers: design, synthesis and application. Chemical  Society Reviews, 42, 8012-8031 (2013). doi:  10.1039/c3cs60160a
Fei Xu,  Hong Xu, Xiong Chen, Dingcai Wu, Yang Wu, Hao Liu, Cheng Gu, Ruowen Fu &  Donglin Jiang. Radical covalent organic frameworks: a general strategy to  immobilize open-accessible polyradicals for high-performance capacitive energy  storage. Angewandte Chemie International Edition,  54, 6814-6818 (2015). doi: 10.1002/anie.201501706
Yang  Wu, Hong Xu, Xiong Chen, Jia Gao & Donglin Jiang. A pi-electronic covalent  organic framework catalyst: pi-walls as catalytic beds for Diels-Alder reactions  under ambient conditions. Chemical Communications,  51, 10096-10098 (2015). doi: 10.1039/c5cc03457d
Ning  Huang, Lipeng Zhai, Hong Xu & Donglin Jiang. Stable Covalent Organic  Frameworks for Exceptional Mercury Removal from Aqueous Solutions.  Journal of the American Chemical Society,  139, 2428-2434 (2017). doi: 10.1021/jacs.6b12328
Cheng  Gu, Ning Huang, Yang Wu, Hong Xu & Donglin Jiang. Design of Highly  Photofunctional Porous Polymer Films with Controlled Thickness and Prominent  Microporosity. Angewandte Chemie International  Edition, 54, 11540-11544 (2015). doi:  10.1002/anie.201504786
Cheng  Gu, Ning Huang, Youchun Chen, Leiqiang Qin, Hong Xu, Shitong Zhang, Fenghong Li,  Yuguang Ma & Donglin Jiang. pi-Conjugated Microporous Polymer Films:  Designed Synthesis, Conducting Properties, and Photoenergy Conversions.  Angewandte Chemie International Edition,  54, 13594-13598 (2015). doi: 10.1002/anie.201506570
Shi  Feng, Hong Xu, Chong Zhang, Yu Chen, Jinghui Zeng, Donglin Jiang & Jia-Xing  Jiang. Bicarbazole-based redox-active covalent organic frameworks for  ultrahigh-performance energy storage. Chemical  Communications, 53, 11334-11337 (2017). doi:  10.1039/c7cc07024a
Xiong  Chen, Ning Huang, Jia Gao, Hong Xu, Fei Xu & Donglin Jiang. Towards covalent  organic frameworks with predesignable and aligned open docking sites.  Chemical Communications, 50,  6161-6163 (2014). doi: 10.1039/c4cc01825g
Xiong  Chen, Matthew Addicoat, Enquan Jin, Lipeng Zhai, Hong Xu, Ning Huang, Zhaoqi  Guo, Lili Liu, Stephan Irle & Donglin Jiang. Locking covalent organic  frameworks with hydrogen bonds: general and remarkable effects on crystalline  structure, physical properties, and photochemical activity. Journal  of the American Chemical Society, 137, 3241-3247  (2015). doi: 10.1021/ja509602c
Xiong  Chen, Matthew Addicoat, Enquan Jin, Hong Xu, Taku Hayashi, Fei Xu, Ning Huang,  Stephan Irle & Donglin Jiang. Designed synthesis of double-stage  two-dimensional covalent organic frameworks. Scientific  Reports, 5, 14650 (2015). doi:  10.1038/srep14650
Mufei  Yu, Hong Xu, Vasiliki Kosma, Jeremy Odent, Kazuki Kasahara, Emmanuel Giannelis & Christopher Ober. Positive Tone Nanoparticle Photoresists: New Insight on  the Patterning Mechanism. Journal of Photopolymer Science and  Technology, 29, 509-512 (2016). doi:  10.2494/photopolymer.29.509
Kazunori  Sakai, Hong Xu, Vasiliki Kosma, Emmanuel P. Giannelis & Christopher K. Ober.  Progress in metal organic cluster EUV photoresists. Journal of  Vacuum Science & Technology B, 36 (2018).  doi: 10.1116/1.5050942
Christopher  K. Ober, Hong Xu, Vasiliki Kosma, Kazunori Sakai & Emmanuel P. Giannelis.  EUV Photolithography: Resist Progress and Challenges. Proceedings of  SPIE, 10583, 1058306 (2018). doi:  10.1117/12.2302759
Christopher  K. Ober, Vasiliki Kosma, Hong Xu, Kazunori Sakai & Emmanuel P. Giannelis.  The Challenges of Highly Sensitive EUV Photoresists. Journal of  Photopolymer Science and Technology, 31, 261-265  (2018). doi: 10.2494/photopolymer.31.261
Vasiliki  Kosma, Kazuki Kasahara, Hong Xu, Kazunori Sakai, Christopher K. Ober &  Emmanuel P. Giannelis. Patterning mechanism of metal based hybrid EUV resists.  Proceedings of SPIE, 10583, 105831U  (2018). doi: 10.1117/12.2297383
Vasiliki  Kosma, Kazuki Kasahara, Hong Xu, J
érémy Odent, Christopher K. Ober &  Emmanuel P. Giannelis. Elucidating the patterning mechanism of zirconium-based  hybrid photoresists. Journal of Micro-Nanolithography Mems and  Moems, 16, 041007-041001-041007 (2017). doi:  10.1117/1.Jmm.16.4.041007
Kazuki  Kasahara, Hong Xu, Vasiliki Kosma, Jeremy Odent, Emmanuel P. Giannelis &  Christopher K. Ober. Nanoparticle photoresist studies for EUV lithography.  Proceedings of SPIE, 10143, 1014308  (2017). doi: 10.1117/12.2258187
Kazuki  Kasahara, Hong Xu, Vasiliki Kosma, Jeremy Odent, Emmanuel P. Giannelis &  Christopher K. Ober. Recent Progress in EUV Metal Oxide Photoresists.  Journal of Photopolymer Science and Technology,  30, 93-97 (2017). doi: 10.2494/photopolymer.30.93
Kazuki  Kasahara, Vasiliki Kosma, Jeremy Odent, Hong Xu, Mufei Yu, Emmanuel P. Giannelis & Christopher K. Ober. Recent progress in nanoparticle photoresists  development for EUV lithography. Proceedings of SPIE,  9776, 977604 (2016). doi: 10.1117/12.2218704

Last updated: 2020-10-07